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Precursors (NAND)

  • 등록일 : 2021. 02. 01
  • 제출자 : R&D
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b73f8a09963beb6539cc80c72988cf88.pngadaab52e1567463ace0dfc2cffb3501b.pngc8ef5bfa160366cfdd7a635a00930da5.png81c4677af68ad6f8004a0617d72ac865.pngff99a8fa72f2a18c402f76bb04ec7762.png


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Element Structure Product
Al 3f545ebe7a0440d659c24a34bce6cd15.png
DMAIPO
Dimethylaluminum isopropoxide, dimer

CAS Number: 6063-89-4
Chemical formula: C10H26Al2O2
Hf 9e41f356f3dec3ce70476d0d1f0f76b4.png
CpHf
Tris(dimethylamino)(cyclopentadienyl) hafnium(IV)

CAS Number: 941596-80-1
Chemical formula: C11H23N3Hf
Hf 07090b2619674e30952be087b63eb1a0.png
WH3; New precursor for high-temp. ALD

CAS Number: -
Chemical formula: -
Mo f25b9b1388d752c9c888d11277b7247e.png
BTBBDMAMo
Bis(tert-butylimido) bis(dimethylamido) molybedenum

CAS Number: 923956-62-1
Chemical formula: C12H30N4Mo
Si 4487df85b574fdfd5d1af24c883461fc.png
HCDS
Hexachloro disilane

CAS Number: 13465-77-5
Chemical formula: Si2Cl6
Si 23345b166af4d7f76ca4345c9a3d1207.png
BDIPADS
1,2-Bis(diisopropylamino) disilane

CAS Number: 151625-26-2
Chemical formula: C12H32N2Si2
Si d6ab52bd0f86a1574553ad78ca0e7ffc.png
BDEAS
Bis(diethylamino) silane

CAS Number: 27804-64-4
Chemical formula: C8H22N2Si
Si 770ba1d7af2cef650f3081d4755ac58e.png
BEMAS
Bis(ethylmethylamino) silane

CAS Number: 1011514-41-2
Chemical formula: C6H18LiNSi2
Si 5172283aa9482ba07f725d53512ab314.png
BTBAS
Bis(tert-butylamino) silane

CAS Number: 186598-40-3
Chemical formula: C8H22N2Si
Si 6293fed58e966f151c10f37172ce78d4.png
BDMADMS
Bis(dimethylamino)dimethyl silane

CAS Number: 3768-58-9
Chemical formula: C6H18N2Si
Si 6200fd97269df2d372a8b7f0a10dab3a.png
DIPATCS
Diisopropylaminotrichloro silane

CAS Number: 18146-02-6
Chemical formula: C6H14Cl3NSi
Si d4005be21af2e2140e530fc470bff748.png


HCDSO

Hexachloro disiloxane

CAS Number: 14986-21-1
Chemical formula: Cl6OSi2
Si b41d46f9d5e7a42de422d6cbce298016.png
HFDS
Hexafluoro disilane

CAS Number: 13830-68-7
Chemical formula: F6Si2
Si a4a42cf05c4a851f23a020966b51ff77.png
OCTS
Octachloro trisilane

CAS Number: 13596-23-1
Chemical formula: Cl8Si3
Si cfa01deac9e55e651ee92ac48ca75d74.png
TMSDMA
N-(trimethylsilyl)dimethylamine

CAS Number: 2083-91-2
Chemical formula: C5H15NSi
Si e8a83e43175d9af5cb15b04c57315c11.png

3DMAS
Tris(dimethylamino) silane

CAS Number: 15112-89-7
Chemical formula: C6H19N3Si
Si 07ec56058d15fbc919b31144e1690ff0.png

4DMAS
Tetrakis(dimethylamino) silane

CAS Number: 1624-01-7
Chemical formula: C8H24N4Si
Si 4a498b08a5ec8d1b648c360d0283627b.png
4TCSS
Tetrakis(trichlorosilyl) silane

CAS Number: 50350-62-4
Chemical formula: Cl12Si5
Si 05ffa7fa53d89943b6ea561bffd33249.png
3DMACS
Tris(dimethylamino)chloro silane

CAS Number: 13307-05-6
Chemical formula: C6H18ClN3Si
Si 3fe46e83ad9e2d2c476178bafa07753c.png
TIPAS
Tris(isopropylamino) silane

CAS Number: 532427-76-2
Chemical formula: C9H25N3Si
Si e6d5df1a9f62267d5507c99a5eb5ceb8.png
TBOSOL
Tris(tert-butoxy) silanol

CAS Number: 18166-43-3
Chemical formula: C12H28O4Si
Si 529179dcbe7f6c52f918b7f411a622a7.png
TPOSOL
Tris(tert-pentoxy) silanol

CAS Number: 17906-35-3
Chemical formula: C15H34O4Si
Si 5f1cd2330a2e076f4363d6bbaa4172b3.png
3TCSS
Tris(trichlorosilyl) sialne

CAS Number: 62257-60-7
Chemical formula: Cl9HSi4
Ta 815502df9c6fe7edfd5bc89877b456d9.png
TBTDET
tert-Butylimido tris(diethylamido) tantalum(V)

CAS Number: 169896-41-7
Chemical formula: (CH3)3CNTa(N(C2H5)2)3
Ta 396205ed4c711010ca2ca965d681c044.png
TBTEMT
tert-Butylimido tris(ethylmethylamido) tantalum(V)

CAS Number: 511292-99-2
Chemical formula: C13H33N4Ta
Ti de2d2ac536c58cf056e788015ac7f0ef.png
TDMAT
Tetrakis(dimethylamido) titanium(IV)

CAS Number: 3275-24-9
Chemical formula: C8H24N4Ti
Ti b35141648a716ccccf6ce855f8a71ebc.png
TEMATi
Tetrakis(ethylmethylamino) titanium(IV)

CAS Number: 308103-54-0
Chemical formula: C12H32N4Ti
Ti d2734fb5e07075878b2eb84073b8f9c2.png

WT02; New precursor for high-k ALD



CAS Number: -
Chemical formula: -

 

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