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ENG ㅣ CN ㅣ KOR
Semiconductor
Product
CVD / Diffusion Etching / Cleaning
NH3 C4F8
N2O SF6
NO F2 Mix
C3H6 CF4
Si2H6 CH2F2
GeH4 Mix SiCl4
Implant / Doping Excimer Laser
BCl3 Mix 3.5% Ar / 10ppm Xe / Ne
BF3 0.95% F2 / 3.5% Ar / Ne
PH3 Mix 1.25% Kr / Ne
C2H4 0.95% F2 / 1.25% Kr / Ne
30, Yangcheong 3-gil, Ochang-eup, Cheongwon-gu, Cheongju-si, Chungcheongbuk-do, Republic of Korea
TEL : 043-210-4600 / FAX : 043-218-8472
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