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ENG ㅣ CN ㅣ KOR
Display
Product
CVD / Diffusion Etching / Cleaning
NH3 BCl3
N2O C2HF5
Cl2 CF4
CO2
SiCl4
Implant / Doping Excimer Laser
SF6 Xe
BF3 4.5%, 5% HCl Mix
PH3 Mix 100ppm H2/Ne
C2H4 O2 / Ne Mix
Ne
30, Yangcheong 3-gil, Ochang-eup, Cheongwon-gu, Cheongju-si, Chungcheongbuk-do, Republic of Korea
TEL : 043-210-4600 / FAX : 043-218-8472
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