Wonik Materials

Element	Structure	Product
Li		LiBTSA Lithium bis(trimethylsilyl)amide CAS Number: 4039-32-1 Chemical formula: C₆H₁₈LiNSi₂
Al		DMAIPO Dimethylaluminum isopropoxide, dimer CAS Number: 6063-89-4 Chemical formula: C₁₀H₂₆Al₂O₂
Si		HCDS Hexachloro disilane CAS Number: 13465-77-5 Chemical formula: Si₂Cl₆
Si		BDIPADS 1,2-Bis(diisopropylamino) disilane CAS Number: 151625-26-2 Chemical formula: C₁₂H₃₂N₂Si₂
Si		BDEAS Bis(diethylamino) silane CAS Number: 27804-64-4 Chemical formula: C₈H₂₂N₂Si
Si		BEMAS Bis(ethylmethylamino) silane CAS Number: 1011514-41-2 Chemical formula: C₆H₁₈LiNSi₂
Si		BTBAS Bis(tert-butylamino) silane CAS Number: 186598-40-3 Chemical formula: C₈H₂₂N₂Si
Si		BDMADMS Bis(dimethylamino)dimethyl silane CAS Number: 3768-58-9 Chemical formula: C₆H₁₈N₂Si
Si		DIPATCS Diisopropylaminotrichloro silane CAS Number: 18146-02-6 Chemical formula: C₆H₁₄Cl₃NSi
Si		HCDSO Hexachloro disiloxane CAS Number: 14986-21-1 Chemical formula: Cl₆OSi₂
Si		HFDS Hexafluoro disilane CAS Number: 13830-68-7 Chemical formula: F₆Si₂
Si		OCTS Octachloro trisilane CAS Number: 13596-23-1 Chemical formula: Cl₈Si₃
Si		TMSDMA N-(trimethylsilyl)dimethylamine CAS Number: 2083-91-2 Chemical formula: C₅H₁₅NSi
Si		3DMAS Tris(dimethylamino) silane CAS Number: 15112-89-7 Chemical formula: C₆H₁₉N₃Si
Si		4DMAS Tetrakis(dimethylamino) silane CAS Number: 1624-01-7 Chemical formula: C₈H₂₄N₄Si
Si		4TCSS Tetrakis(trichlorosilyl) silane CAS Number: 50350-62-4 Chemical formula: Cl₁₂Si₅
Si		3DMACS Tris(dimethylamino)chloro silane CAS Number: 13307-05-6 Chemical formula: C₆H₁₈ClN₃Si
Si		TIPAS Tris(isopropylamino) silane CAS Number: 532427-76-2 Chemical formula: C₉H₂₅N₃Si
Si		TBOSOL Tris(tert-butoxy) silanol CAS Number: 18166-43-3 Chemical formula: C₁₂H₂₈O₄Si
Si		TPOSOL Tris(tert-pentoxy) silanol CAS Number: 17906-35-3 Chemical formula: C₁₅H₃₄O₄Si
Si		3TCSS Tris(trichlorosilyl) sialne CAS Number: 62257-60-7 Chemical formula: Cl₉HSi₄
Ti		TDMAT Tetrakis(dimethylamido) titanium(IV) CAS Number: 3275-24-9 Chemical formula: C₈H₂₄N₄Ti
Ti		TEMATi Tetrakis(ethylmethylamino) titanium(IV) CAS Number: 308103-54-0 Chemical formula: C₁₂H₃₂N₄Ti
Ti		WT02; New precursor for high-k ALD CAS Number: - Chemical formula: -
V		TDMAV Tetrakis(dimethylamido) vanadium(IV) CAS Number: 19824-56-7 Chemical formula: C₈H₂₄N₄V
V		TEMAV Tetrakis(ethylmethylamido) vanadium(IV) CAS Number: 791114-66-4 Chemical formula: C₁₂H₃₂N₄V
Co		CpCo(CO)₂ Dicarbonylcyclopentadienyl cobalt(I) CAS Number: 12078-25-0 Chemical formula: C₇H₅O₂Co
Co		CCTBA Dicobalt hexacarbonyl tert-butylacetylene CAS Number: 56792-69-9 Chemical formula: C₁₂H₁₀O₆Co₂
Zr		CpZr Tris(dimethylamino)(cyclopentadienyl) zirconium(IV) CAS Number: 33271-88-4 Chemical formula: C₁₁H₂₃N₃Zr
Zr		WZ3; New precursor for high-temp. ALD CAS Number: - Chemical formula: -
Nb		TBTDEN tert-Butylimido tris-(diethylamido) niobium(V) CAS Number: 210363-27-2 Chemical formula: C₁₆H₃₉N₄Nb
Mo		BTBBDMAMo Bis(tert-butylimido) bis(dimethylamido) molybedenum CAS Number: 923956-62-1 Chemical formula: C₁₂H₃₀N₄Mo
Ru		Ru(EtCp)₂ Bis(ethylcyclopentadienyl) ruthenium(II) CAS Number: 32992-96-4 Chemical formula: C₁₄H₁₈Ru
Ru		Ru(CHD)(CO)₃ Tricarbonyl(η4-cyclohexa-1,3-diene) ruthenium CAS Number: 12108-25-7 Chemical formula: C₉H₈O₃Ru
Ta		TBTDET tert-Butylimido tris(diethylamido) tantalum(V) CAS Number: 169896-41-7 Chemical formula: (CH₃)₃CNTa(N(C₂H₅)₂)₃
Ta		TBTEMT tert-Butylimido tris(ethylmethylamido) tantalum(V) CAS Number: 511292-99-2 Chemical formula: C₁₃H₃₃N₄Ta
Hf		CpHf Tris(dimethylamino)(cyclopentadienyl) hafnium(IV) CAS Number: 941596-80-1 Chemical formula: C₁₁H₂₃N₃Hf
Hf		WH3; New precursor for high-temp. ALD CAS Number: - Chemical formula: -

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Precursors (DRAM)