R&D of Precursor for Semiconductor Devices
R&D Activities in Precursor Lab.
∙ Precursor Synthesis Lab. - Design of new precursors and synthesis
∙ Thin-Film Deposition Lab. - Evaluation of new precursors and development of deposition process
∙ Simulation Lab. - Simulation for design & synthesis of new precursors, deposition & etching process, and etc.
R&D Facilities
Synthesis Lab. Facilities
Analysis Equipments
CVD/ALD & Measurement Equipments
Precursors
Inclusive and Valuable Growth Through Co-R&D With Various Customers
Precursor Lab. is also developing new precursors and solutions through the collaborative projects with our customers. We welcome and are ready to cooperate with customers at various R&D levels.