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Metal Precursors for CVD/ALD (Ver. 20200407)

  • 등록일: 2020. 03. 19
  • 제출자: R&D

□ Metal Precursors for CVD/ALD

                       

Element Product Structure Properties Application
Li
Lithium bis(trimethylsilyl)amide
Image MW: 167.33g/mol
BP: -
VP: -
MP: 86℃
Purity: >98%
CAS No.: 4039-32-1
Appearance: White crystalline solid
Mg
Magnesium bis(n,n-dimethylaminodiboronate)
Image MW: 167.79g/mol
BP: -
VP: 0.8torr@25℃
MP: 70℃
Purity: >98% (NMR)
CAS No.: 1071800-77-5
Appearance: White crystalline solid
Ti TDMAT
Tetrakis(dimethylamino) titanium
Image MW: 224.18g/mol
BP: 225℃@760torr
VP: 0.1torr@25℃
MP: 4℃
Purity: >99%
CAS No.: 3275-24-9
Appearance: Reddish Liquid
Barrier Metal
Ti Trimethoxy(pentamethylcyclopentadienyl) titanium(IV) Image MW: 276.21g/mol
BP: 285℃@760torr
VP: 1torr@85℃
MP: -
Purity: 99% (NMR)
CAS No.: 123927-75-3
Appearance: Reddish liquid
V TDMAV
tetrakis(dimethylamido) vanadium
Image MW: 227.25g/mol
BP: 211℃@760torr
VP: 1torr@64℃
MP: 53℃
Purity: >97%
CAS No.: 19824-56-7
Appearance: Dark green crystalline solid
V TEMAV
tetrakis(ethylmethylamido) vanadium
Image MW: 283.36g/mol
BP: 230℃@760torr
VP: 1torr@107℃
MP: -
Purity: >97%
CAS No.: 79111-66-4
Appearance: Dark green liquid
Co CpCo(CO)2
Image MW: 180.05g/mol
BP: 37℃@2torr
VP: 0.5torr@25℃
MP: -22℃
Purity: >99%
CAS No.: 12078-25-0
Appearance: Dark red liquid
Co CCTBA
Dicobalt Hexacarbonyl tert-Butylacetylene
Image MW: 355.86g/mol
BP: 52℃@0.8torr
VP: 1.5torr@57℃
MP: -
Purity: >99%
CAS No.: 56792-69-9
Appearance: Dark brown liquid
Nb TBTDEN
tert-butylimido tris(diethylamido) niobium
Image MW: 380.41g/mol
BP: 109℃@1.5torr
VP: 1torr@91℃
MP: -
Purity: >98%
CAS No.: 210363-27-2
Appearance: Pale yellow liquid
Nb TBTEMN
tert-butylimido tris(ethylmethylamido) niobium
Image MW: 338.34g/mol
BP: 87℃@1.5torr
VP: 1torr@78℃
MP: -
Purity: >98% (NMR)
CAS No.: 864150-47-0
Appearance: Pale yellow liquid
Mo



bis(tert-butylimido) bis(dimethylamido) molybdenum
Image MW: 326.34g/mol
BP: 62℃@0.03torr
VP: -
MP: -
Purity: >98% (NMR)
CAS No.: 923956-62-1
Appearance: Colorless liquid
Ru Ru(EtCp)2
[Bis(ethylcyclopentadienyl)ruthenium(II)]
Image MW: 287.36g/mol
BP: 267℃@760torr
VP: 0.2torr@85℃
MP: -
Purity: >99%
CAS No.: 32992-96-4
Appearance: Yellow liquid
Ru
tricarbonyl (η4-cyclohexa-1,3-diene)ruthenium
Image MW: 265.95g/mol
BP: -
VP: -
MP: -
Purity: >99%
CAS No.: 12108-25-7
Appearance: Yellow liquid
Ta TBTDET
tert-butylimido tris(diethylamido) tantalum
Image MW: 468.47g/mol
BP: 95℃@0.5torr
VP: -
MP: -
Purity: >98% (NMR)
CAS No.: 169896-41-7
Appearance: Pale yellow liquid
Ta

TBTEMT

tert-butylimido tris(ethylmethylamido) tantalum

Image MW: 426.39g/mol
BP: 98℃@1.8torr
VP: 0.5torr@100℃
MP: -
Purity: >98% (NMR)
CAS No.: 511292-99-2
Appearance: Pale yellow liquid
Zr CpZr
Tris(dimethylamino)(cyclopentadienyl)zirconium
Image MW: 288.54g/mol
BP: 86℃@0.1torr
VP: 1.5torr@100℃
MP: -
Purity: >99.8% (NMR)
CAS No.: 33271-88-4
Appearance: Pale yellow liquid
Zr

WZ3

(High Temp. Process Window)

Image MW: -
BP: -
VP: 1torr@120℃ (TGA)
MP: -
Purity: >99.8% (NMR)
CAS No.:
Appearance: Pale yellow liquid
Hf CpHf
Tris(dimethylamino)(cyclopentadienyl)Hafnium
Image MW: 375.81g/mol
BP: 84℃@0.1torr
VP: 0.9torr@90℃
MP: ℃
Purity: >99.8% (NMR)
CAS No.: 33271-88-4
Appearance: Pale yellow liquid
Hf

WH3

(High Temp. Process Window)

Image MW: -
BP: -
VP: -
MP: -
Purity: >99.8% (NMR)
CAS No.:
Appearance: Pale yellow liquid


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