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Reporting

Si Precursors for CVD/ALD (Ver. 20200407)

  • 등록일: 2020. 03. 19
  • 제출자: R&D

□ Si Precursors for CVD/ALD
 

No. Product Structure Properties Application
1 HCDS
Hexachlorodisilane


MW: 268.89g/mol
BP: 145℃@760torr
VP: 100torr@85℃
MP: -1℃
Purity: >99.7%
CAS No.: 13465-77-5
Appearance: Colorless Liquid
Dielectric
2 BIDIPADS
1,2-bis(diisopropylamino)disilane
MW: 260.57g/mol
BP: 235℃@760torr
VP: 1torr@75℃
MP: -
Purity: >99%
CAS No.: 151625-26-2
Appearance: Colorless liquid
3 BDEAS
bis(diethylamino)silane
MW: 174.36g/mol
BP: 188℃@760torr
VP: 30torr@70℃
MP: -
Purity: >99%
CAS No.: 27804-64-4
Appearance: Colorless liquid
4 BEMAS
bis(ethylmethylamino)silane
MW: 146.31g/mol
BP: 134℃@760torr
VP: -
MP: -
Purity: >99%
CAS No.: 1011514-41-2
Appearance: Colorless liquid
5 BTBAS
bis(diethylamino)silane
MW: 174.36g/mol
BP: 167℃@torr
VP: -
MP: -
Purity: >99%
CAS No.: 186598-40-3
Appearance: Colorless liquid
6 BDMADMS
bis(dimethylamino)dimethylsilane
MW: 146.31g/mol
BP: 129℃@760torr
VP: -
MP: -
Purity: >99%
CAS No.:
Appearance: 3768-58-9
7 DIPATCS
diisopropylaminotrichlorosilane
MW: 234.63g/mol
BP: 205℃@760torr
VP: 1torr@29℃
MP:-
Purity: >99%
CAS No.: 18146-02-6
Appearance: Colorless liquid
8 HCDSO
hexachlorodisiloxane
MW: 284.89g/mol
BP: 137℃@760torr
VP: -
MP: -
Purity: >99%
CAS No.: 14986-21-1
Appearance: Colorless to light yellow liquid
9 HFDS
hexafluorodisilane
MW: 284.89g/mol
BP: -18.5℃@760torr
VP: 58.4psi @ 26.6℃
MP:
Purity: >95%
CAS No.: 13830-68-7
Appearance: Colorless gas
10 OCTS
octachlorotrisilane
MW: 367.86g/mol
BP: 215℃@760torr
VP: 10torr@90℃
MP:
Purity: >99%
CAS No.: 13596-23-1
Appearance: Colorless liquid
11 TMSDMA
n,n-dimethyltrimethylsilylamine
MW: 117.26g/mol
BP: 84℃@760torr
VP: 1torr@90℃
MP: -
Purity: >99%
CAS No.: 2083-91-2
Appearance: Colorless liquid
12 3DMAS
tris(dimethylamino)silane
MW: 161.32g/mol
BP: 145℃@760torr
VP: 13torr@36℃
MP: -
Purity: >99.5%
CAS No.: 15112-89-7
Appearance: Colorless liquid
13 4DMAS
tetrakis(dimethylamino)silane
MW: 204.39g/mol
BP: 196℃@760torr
VP: 32torr@97℃
MP: -
Purity: >99.5%
CAS No.: 1624-01-7
Appearance: Colorless liquid
14 4TCSS
tetrakis(trichlorosilyl)silane
MW: 565.87g/mol
BP: 190℃@15torr
VP: 0.1torr@25℃
MP: -
Purity: >98%
CAS No.: 50350-62-4
Appearance: Colorless liquid
15 3DMACS
tris(dimethylamino)chlorosilane
MW: 195.77g/mol
BP: 78℃@14torr
VP: -
MP: -
Purity: >99%
CAS No.: 13307-05-6
Appearance: Colorless liquid
16 TIPAS
tris(isopropylamino)silane
MW: 203.41g/mol
BP: 192℃@760torr
VP: 1torr@33℃
MP: -
Purity: >99%
CAS No.: 532427-76-2
Appearance: Colorless liquid
17 TBOSOL
tris(tert-butoxy)silanol
MW: 264.43g/mol
BP: 210℃@760torr
VP: 0.4torr@55℃
MP: 65℃
Purity: >99%
CAS No.: 18166-43-3
Appearance: White crystal
18 TPOSOL
tris(tert-pentoxy)silanol
MW: 306.51g/mol
BP: 99℃@760torr
VP: 1torr@84℃
MP: -
Purity: >99%
CAS No.: 17906-35-3
Appearance: Colorless liquid
19 3TCSS
tris(trichlorosilyl)silane
MW: 432.43g/mol
BP: 62℃@760torr
VP: 1torr@75℃
MP: 30℃
Purity: >99%
CAS No.: 62257-60-7
Appearance: White solid or Colorless liquid


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